Inspection tools

After each process step a range of inspection tools are available.
Measuring for instance the wetability of your substrate surface (hydrophoob or hydrophilic) with a Ramé-Hart contact angle tool or the Layer thickness of a deposited film with the help of a Tencor profilometer .
Other available tools are for instance a UV-VIS spectrophotometer, a Quicklaze lasercutter, a 4-point probe to measure sheet resistance or just have an optical inspection with one of our microscopes, to ensure that each process step done fullfills your expectations.

The Ramé-Hart contact Angle Tool

The phenomenon of wetting or non-wetting of a solid by a liquid is better understood by studying what is known as contact angle. The Contact Angle Tool characterizes this behavior.
Good wetting can be important for several reasons like the deposition of a liquid material by spincoating and the adhesion of this material to the substrate.
When a liquid is placed in contact with a solid surface, the bare surface of the solid absorbs the vapor of the liquid until the volatility of the absorbed material is equal to that of the liquid. When equilibrium is established, there is a liquid-solid interface between the two phases.

The tangent angle between solid and liquid is known as the contact angle.

Within Device Processing the tool is used to determine the contact angle between cleaning steps or after deposition of an organic/anorganic thin film on a substrate (glass, plastic, etc.).

The Ramé-hart Standard Automated goniometer is fully software driven allowing the user to take automated contact angle measurements using the DROPimage.
This system has a substrate size limit of 3"x6"x1".

Laser-repair with the Quicklaze Trilite lasercutter

Within Device Processing a laser repair system is available.It is a frequency doubled and tripled pulsed Nd:YAG (Neodynium:Yttrium-Aluminium-Garnet) laser system (fig. 1). Energy, wavelength and cutting size are adjustable.
It is possible to ablate a large variety of materials like ITO (fig. 2) or chromium (fig. 3).
Applications are: LCD repair, removal of passivation layers, cutting of metal lines and removal of nitride or polymide with UV-energy (see table)

Specifications:

Wavelengths 1064 nm 532 nm 355 nm

Pulswidth 7 ns 6 ns 5 ns

Energy 0.6 mJ 0.5 mJ 0.4 mJ

Min.cut size 2x2 µm 1x1 µm 1x1 µm

Max. cut size (single pulse): 50x50 µm, 50x objective
Repetition rate: single shot up to 20Hz
External control: RS232, DB 25 connector, ASCII commands

Fig. 1

Fig. 2

Fig. 3

Recommended Wavelengths for lasercutting

	1064nm(IR)	532nm (Green)	355nm (UV)
Passivation layers Metal Lines LCD repair	Aluminium Chrome ITO Chrome Red color filter	Silicon Dioxide Nitride Polyimide (big cuts) SOG Poly-silicon Gold Aluminium Tungsten Copper Thick and Thin-film Resistors Chrome ITO Chrome Green & blue color filter	nitride Polyimide Teflon Silox Aluminium Gold Top Coat Green & blue color filter

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