Electron beam

This cluster is one of the workshops that support Philips Research and is located at the Philips Hightech Campus in Eindhoven, The Netherlands. It evolved from a mask-making shop, manufacturing masks for optical lithography. As these masks became increasingly demanding and at the same time more readily available from commercial mask shops, the attention of this cluster shifted to direct write of the gate level of advanced IC's. More and more the technique is employed to non-IC applications, such as manufacturing of optics, molds etc.

The cluster is firmly embedded in a larger organization, DTS Thin Film Facilities, where depositions of almost any material on almost any substrate, as well as etching of the resulting material-systems may be undertaken. Machining of the substrates is also possible in one of the nearby workshops on the Philips Hightech Campus. The close cooperation in this organization make this site an ideal place to have designs containing nano-sized features turned first time into hardware.

Our first priority is to support Philips Research, but if resources are available, we work for other parts of Philips or even customers outside the Philips organization. We are interested in partnerships that keep our edge sharp.

All exposures are performed with a high-tech piece of equipment, the from Jeol.