We support the entire life cycle of process equipment: from specification, realization (make or buy), installation, acceptance, maintenance and modification to re-use and disposal. The focus is on microfabrication equipment with vacuum, gas handling and mechatronics aspects.

We can design and make protypes of mechatronic and/or vacuum equipment including Residual Gas Analysis (RGA)

Facilities and gas handling support for process technology areas like cleanrooms, including the utilities: specification, design, validation and working methods.

Re-use of process equipment and administration of the entire life cycle.