Substrates:
* 100 ,150 and 200 mm wafers.
* 127 x 152 mm glass
* 75 x 85 mm glass
Typical dose up to 1e16 at/cm2, energy 6 - 80 keV.
Implanted species: B,As,P.
Implanted angle range -10 to 10 degrees.
| This Applied Quantum 684 implanter is located in cleanroom WAG. Substrates: * 100 ,150 and 200 mm wafers. * 127 x 152 mm glass * 75 x 85 mm glass Typical dose up to 1e16 at/cm2, energy 6 - 80 keV. Implanted species: B,As,P. Implanted angle range -10 to 10 degrees. |
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