Optical coatings

An optical coating is a stack of thin films with different refractive indices. The coatings made are anti-reflection coatings, reflectors, band pass filters, short wave pass, long wave pass, beam splitters etc.

For designing these filters the TFCalc program is used. The output of the program is a simulation of the filter and a recipe for making it. 

The coatings are made with sputter deposition of for instant alternating SiO2 and Ta2O5 layers. Layer thickness is controlled with in situ reflection measurement. Thickness uniformity is 1.5 % over 100 mm. Only flat substrates can be coated. Some other materials that can be used are: Al2O3, TiO2 and Si3N4
On request e-gun evaporation can be used. 

Optical measurements are done with a Perkin Elmer Lambda 9 spectrometer. 

In the figures a calculated and measured short wave pass is shown. The coating consists of nine layers of SiO2 and Ta2O5

 


Fig. 1
Calculated values

 

Fig. 2
Measurement results


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