Presentations and publications of the Mems2Tune project:

Author(s)

  

 List of publications

   Venue, Date
J. De Coster, H.A.C Tilmans, K. Hameyer, R. Puers    "Mechanical Design of RF-MEMS Capacitive Switches", Proc. 3rd Workshop on Semiconductor Sensor and Actuator Technology (SeSens 2002), Veldhoven, The Netherlands,   Nov.29, 2002, 4pp.
         
W.M. van Spengen, R. Puers, R. Mertens, I. De Wolf     "A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches" J. Micromech. Microeng.    V13 (2003) pp.604-612
         
J. De Coster; R. Puers, H.A.C. Tilmans, J.T.M. van Beek, Th.G.S.M. Rijks,   "Variable RF MEMS capacitors with extended tuning range", TRANSDUCERS, 12th Int. Conf. on Solid-State Sensors, Actuators and Microsystems,    2003, Vol. 2, pp.1784
         
M. Paillard, Th.G.S.M. Rijks, J.T.M. van Beek, J. De Coster, S. Desgrez, O. Vendier, J.L. Cazaux   proc. MEMSWAVE 2003,    Toulouse, 2-4 July 2003
         
 I. De Wolf ,    "Reliability Investigation of RF-MEMS" proc. MEMSWAVE 2003   Toulouse, 2-4 July 2003
         
Th. Rijks, J.T.M. van Beek, M.J.E. Ulenaers, J. de Coster, A. den Dekker, L. van Teeffelen,    "Passive Integration and RF-MEMS: a toolkit for adaptive LC circuits" Proc. ESSCIRC 2003, Estoril,   Portugal Sept. 16-18 2003, p.269
         
J.T.M. van Beek, M.H.W.M. van Delden, A. van Dijken, P. van Eerd, M. van Grootel, A.B.M. Jansman, A.L.A.M. Kemmeren, Th.G.S.M. Rijks, P.G. Steeneken, J. den Toonder, M. Ulenaers, A. den Dekker, P. Lok, N. Pulsford, F. van Straten, L. van Teeffelen, J. De Coster, R. Puers   "High-Q integrated passives RF passives and micro-mechanical capacitors on Si", Proc. BCTM 2003   Toulouse, 28-30 Sept. 2003, pp.147-150
         
J. De Coster, H.A.C Tilmans, J.T.M. van Beek, Th.G.S.M. Rijks, R. Puers    ,'Determination of minimum electrostatic switching voltage in the presence of external device accelerations', Proc. MME 2003, Delft, the Netherlands   Nov. 2-4, pp. 69-72.
         
R. Modlinski, A. Witvrouw, P. Ratchev, R. Puers, J.M.J. den Toonder, I. De Wolf   Reliability of RF-MEMS: stress relaxation in Al-alloy films" Proc. MME 2003, Delft, the Netherlands   Nov. 2-4, pp.155-158
         
J.T.M. van Beek, M.H.W.M. van Delden, A. van Dijken, P. van Eerd, A.B.M. Jansman, A.L.A.M. Kemmeren., Th.G.S.M. Rijks, P.G. Steeneken, J. den Toonder, M.J.E. Ulenaers, A. den Dekker, P. Lok, N. Pulsford, F. van Straten, L. van Teeffelen, J. de Coster, and R. Puers   "High-Q integrated RF passives and RF-MEMS on silicon", MRS fall meeting    1-5 Dec, 2003, Boston, Mat. Res. Soc. Symp. Proc. Vol.783, pp. B3.1.1-B3.1.12
         
H. Tilmans   "RF-MEMS: Materials and technology, integration and packaging" MRS fall meeting    1-5 Dec, 2003, Boston, Mat. Res. Soc. Symp. Proc. Vol.783, pp. B6.6.1-B6.6.12
         
 W.M. van Spengen, R. Puers, R. Mertens, I. De Wolf    "A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches" J. Micomech.    Microeng., 14(2004) pp.514-521
         
Th.G.S.M. Rijks, J.T.M. van Beek, P.G. Steeneken, M.J.E. Ulenaers, J. De Coster, R. Puers,    "RF MEMS tunable capacitors with extended tuning range" MEMS 2004 digest   Maastricht, Jan. 25-29, 2004. pp.777-780
         
Shu-Ang Zhou/Joost van Beek    Ericsson Hopes for Mechanical Mobiles,Article in a Swedish newspaper, Original version / English version   05-04-2002
         
Press release Philips   Philips develops integrated Micro Electro-Mechanical Systems (MEMS) to enhance mobile phone performance

Scientists at Philips Research have perfected new MEMS (Micro Electro-Mechanical System) devices that will significantly enhance the performance and minimize the size of RF circuits in mobile phones.		   February 2, 2004
         
J. De Coster, H. A. C. Tilmans, J. T. M. van Beek, Th. G. S. M. Rijks, P. G. Steeneken, R. Puers  

"Operation of RF MEMS switches and relays in shock environments", Proc. MEMSWAVE'04

  Uppsala, Sweden, June 30-July 2, pp. F6-F9
         
Th.G.S.M. Rijks, J.T.M. van Beek, P.G. Steeneken, M.J.E. Ulenaers, P. van Eerd, J. De Coster, R. Puers, J.W. Weekamp, J.M. Scheer, H.A.C. Tilmans and A. Jourdain   MEMS Tunable Capacitors and Switches for RF Applications (RF MEMS)', Digest MIEL 2004, Nis,    Serbia and Montenegro, May 16-19, 6pp.
         
.M.J. den Toonder, A.R. van Dijken   J: Optimization of mechanical properties of thin free-standing metal films for RF-MEMS. MRS Symp. Proc. Vol. 820, paper O8.3, MRS Spring meeting   San Francisco (2004).
A. Jourdain, K. Vaesen, J.M. Scheer*, J.W. Weekamp*, J.T.M. van Beek** and H.A.C. Tilmans   From zero to second level packaging of RF-mems devices   2005
         

P.G. Steeneken, Th.G.S.M. Rijks, J.T.M. van Beek, M.J.E. Ulenaers, J. De Coster and R. Puers2

  

Dynamics and squeeze film gas damping of a capacitive RF MEMS switch

 		   2005
         

 

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Last updated on 25 Oct 2005
(c) Mems2Tune project, 2001